JPS6284048U - - Google Patents
Info
- Publication number
- JPS6284048U JPS6284048U JP17519385U JP17519385U JPS6284048U JP S6284048 U JPS6284048 U JP S6284048U JP 17519385 U JP17519385 U JP 17519385U JP 17519385 U JP17519385 U JP 17519385U JP S6284048 U JPS6284048 U JP S6284048U
- Authority
- JP
- Japan
- Prior art keywords
- dry plate
- glass dry
- opening
- contact exposure
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17519385U JPS6284048U (en]) | 1985-11-14 | 1985-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17519385U JPS6284048U (en]) | 1985-11-14 | 1985-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6284048U true JPS6284048U (en]) | 1987-05-28 |
Family
ID=31114288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17519385U Pending JPS6284048U (en]) | 1985-11-14 | 1985-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284048U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56151939A (en) * | 1980-04-28 | 1981-11-25 | Toray Ind Inc | Method and apparatus for vacuum contacting photomask |
-
1985
- 1985-11-14 JP JP17519385U patent/JPS6284048U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56151939A (en) * | 1980-04-28 | 1981-11-25 | Toray Ind Inc | Method and apparatus for vacuum contacting photomask |
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